Piezocon® Binary Gas Concentration Sensor/Controller
Installation Guides and Manuals
Articles and Publications
In a recent publication, Intel Corp found Lorex's Piezocon® Gas Concentration Control System as an Acoustic Control System for Dopant, greatly improved the stability of B-SiGe epitaxy deposition
Intel-Improvement of dopant concentration control with Piezocon for B-SiGe epitaxy deposition
Texas Instruments - Deposition Rate Control During Silicon Epitaxy
For Technical Help Contact –
Dr. Don Sirota (845) 471-7740 x222
Or e-mail: Sirotad@lorex.com