Piezocon Specifications |
|
|---|---|
| Range of Concentration | 0% to 100% |
| Accuracy of Concentration Measurement | 0.005% FS for TMIn/H2, 0.7% conc @250 Torr |
| Repeatability of Concentration Measurement | 0.0007% FS 1σ for TMIn/H2, 0.7%conc @250 Torr |
| Sensor to Sensor Reproducibility | 0.0021% |Xa_bar-Xb_bar| for TMin/H2, 0.7%conc@250 Torr |
| Sensor Response Time | 300 mSec |
| Maximum Operating Pressure | 8,000 torr (150 psia) |
| Minimum Operating Pressure | 50 to 100 Torr (typical) |
| Range of Flow Rates | 0 to 3 lpm (other standard flow ranges are 15 lpm, 50 lpm, 100 lpm) |
| Temperature Range | 0 oC to 100 oC |
| Pressure Connections | Standard male 1/4 inch VCR fittings (Cajon) |
| Leakage to Atomosphere | less than 10-9 cc/sec of He |
| VCR face-to-face Dimension | 124 mm (4.88") |
| Weight(Sensor) | 1.3 Kg |
| Weight(4-Channel Electronics) | 2.2 Kg |
| Flow Path Surface Finish | 12 Ra (5 Ra Optional) |
| CE Mark Compliance | EMC Directive 89/336/EEC, Safety Directive 73/23/EEC |
| Power Requirements | 100-240 VAC, 50-60 Hz Internal 250V, 1.6A Slow Blow Fuse |
| Communication | RS-232 Serial Port, 38400, No Parity, 8 data bits, 1 stop bit |
| Analog Output | 12-bit DAC, 0-5V or 0-10V |
| Measurement Read Out via RS-232 | 1-Channel Controller: 3 samples/sec 4-Channel Controller: 3 samples/sec/channel |
| Optional Fieldbus | DeviceNet, ProfiBus |
Notes:
FS: Full Scale Output
conc: Concentration
psia: Pound(s) Per Square Inch Absolute
lpm: Liter Per Minute
Other Features:
- All 316L Stainless Steel internal construction, no o-ring to be wetted by Alkyls
- 9.8 cc acoustic chamber provides minimal dead space for faster response time
- Pre-programmed/user downloadable mechanical and thermodynamic properties of all commonly found precursor gases to CVD, Mo-CVD, ALD for metal organic, dielectric, dopant, barrier interconnect, contact, etc. Lifetime support for new sources via downloadable files -- simply provide Lorex with chemical formula of new source.
- Continuously computes compressibility factor and specific ratio as a function of operating temperature and pressure for most accurate calculation of concentration. (Other monitors assume ideal gas low, i.e., the compressibility factor z=1 (PV=NzRT). However, virtually all precursor sources are non-ideal vapors. For example, the compressibility for TMIn is z=0.9002 at standard conditions and z=0.9757 at 25 oC and 250 Torr)
- Variable frequency (spread spectrum) acoustic measurement ensures accurate condition measurement for all measurement temperatures, pressures and flow conditions.
- Six user selectable concentration output formats
- Simplified control of CVD source mass transfer rate using Piezocon concentration formats 4,5 or 6.
- Small, compact profile is easily integrated into gas panel, 4.88" (124mm) face-to-face VCR fittings (same as standard MFC)
- Optional DeviceNet, ProfiBus and ModBus compatible for future communication requirements
- 1-channel and 4-channel controller simplifies hardware installation and optimize rack space usage