| Mixture | Repeatability | Accuracy | Reproducibility |
|---|---|---|---|
| SILCORE™ / H2 | 0.005% | 0.037% | 0.025% |
| TCS / H2 | 0.0022% | 0.017% | 0.011% |
| GeCl4 / H2 | 0.00097% | 0.0073% | 0.0048% |
| Mixture | Repeatability | Accuracy | Reproducibility |
|---|---|---|---|
| SILCORE™ / H2 | 0.005% | 0.037% | 0.025% |
| TCS / H2 | 0.0022% | 0.017% | 0.011% |
| GeCl4 / H2 | 0.00097% | 0.0073% | 0.0048% |