| 1. QGAS/QMIXTURE |
Ratio of process gas volumetric flow rate to total volumetric flow rate
at actual conditions |
LPM/LPM |
| 2. QGAS/QCARRIER |
Ratio of process gas volumetric flow rate to carrier gas volumetric flow
rate at actual conditions |
LPM/LPM |
| 3. QGAS/QCARRIER@STD |
Ratio of process gas volumetric flow rate to carrier gas volumetric flow
rate at standard conditions |
SLPM/SLPM |
| 4. GGAS/QCARRIER@STD |
Ratio of process gas mass flow rate to carrier gas volumetric flow rate
at actual conditions |
(grams/min)/SLPM |
| 5. MOLGAS/QCARRIER@STD |
Ratio of process gas molar flow rate to carrier gas volumetric flow rate
at actual conditions |
(MOL/min)/SLPM |
| 6. MFC MULTIPLIER |
MFC set-point correction factor user
multiplies by current MFC set-point to yield new corrected MFC set-point
that will reestablish the desired chemical delivery rate. During normal
operation this number typically will range from 0.8 to 1.2 |
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