Piezocon® Acoustical Gas Concentration Sensor / Controller
Piezocon® is an in-line acoustic binary gas concentration sensor used for sensing the ratio of process gas and carrier gas. Piezocon® generates acoustical signals that travel through the gas mixture, using state-of-the-art digital signal processing techniques to precisely measure the time of travel of the acoustical signals and then calculate the concentration of process and carrier gases based on their physical properties. The Piezocon uses its concentration measurement to control the true grams/minute mass transfer rate of the process vapor, perfectly compensating for any variations in concentration that can cause process discrepancies of up to 25-30% in predicted results.
For example:
- Ambient temperature variations
- Ambient pressure variations
- Dynamic line pressure variations
- Gas compressibility factor
- Bubbler and system temperature variations
- Liquid source level or solid source surface area
- Process shift due to dopant premix cylinder swap out
- Process shift due to “ageing” of dopant premix
- Condensation
The Piezocon® Technology is patented under US 6,116,080, US 6,192,379, US 6,199,423 and US 6,279,379.
Piezocon® brings big advantages to a small footprint
The Piezocon sensor, with the same versatile 4.88" (124mm) face-to-face dimension as a small MFC, has proven itself in the field in a variety of demanding military and industrial applications. Harnessing a near-field spread-spectrum acoustical signal for measurement means Piezocon® technology is inherently free of circuit drift. It also means the Piezocon® sensor can be constructed entirely of high purity materials, such as rugged 316L stainless steel, known to prevent problems of contamination due to out-gassing and corrosion from reactive gases. The Piezocon Sensor carries UL1604 and ATEX certification for operation in hazardous environments.
Piezocon® meets your challenge
Highly responsive, stable, and capable of long term reliable and accurate operation, the Piezocon® system is ideal for applications where safety monitoring is critical. It is suitable for upgrading a wide range of vapor delivery and gas monitoring systems including those used in the manufacture of plastics, fiber optics, and semiconductors, in nuclear power generation and in the oil and gas industries.
Piezocon® offers flexible, familiar installation
The Piezocon® is insensitive to mounting orientation, so it allows for greater flexibility of configuration, yet installs much like the typical mass flow controller you're used to using.
Piezocon® is available now
Ready for adaptation to your application, this exciting new technology is fully supported by the team at Lorex Industries, Inc.
- Epitaxy Growth Control
- CVD and MoCVD
- Fiber Optics
Performance and Specifications
- Piezocon® Sensor
- Piezocon HeatSense Heater Jacket
- Heater Controller
- 1-Channel Electronics: Panel Mount
- 1-Channel Electronics: Din Rail Mount
- 4-Channel Electronics
Partial List of Most Common Chemicals Supported by Piezocon®
Alcohols(Methyl, Ethyl, Isopropyl), Ar, AsH3, B2H6, BCl3, C2F6, C2H4O, CBr4, CBrCl, CCl4, CF4, Cl2, SiCl4, CO, CO2, CP2MG, DCE, DCS, DEZn, DMHZ, DMZn, GeCl4, GeH4, H2, H2O, H2S, H2Se, HBr, HCl, He, He3, HMDS, HMDSO, N2, NF3, NH3, O2, O3, PH3, PoCl3, Si2H6, SiH4, SO2, TBAS, TBP, TCMSi, TCS, TDEAV, TDEAZ, TDMAl, TDMAT, TEAL, TEAs, TEB, TEGa, TEIn, TEOS, TEPO, TESb, TETIn TiCl4, TMAl, TMAs, TMB, TMGa, TMI, TMPO, TMSb, TMSi TTBAl, TTBS, Xe
For the complete list of chemicals, or for specific chemicals, please contact Lorex Industries, Inc.
