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DigiFlow Specifications

Accuracy of Mass Flow Measurement 0.05% FS 1σ (30 PSIA unit)
Range of Flow Rate 0 to 0.5 SLPM, 1 SLPM, 10 SLPM, 50 SLPM N2
Sensor to Sensor Reproducibility 0.05% FS
Maximum Operating Pressure 30 PSIA, 45 PSIA, 60 PSIA, 100 PSIA, etc.
Depends on pressure transducer specification
Operating Temperature Range 0-125oC
Connections Standard male 1/2 inch VCR fittings
Leakage to Atmosphere less than 10-9 cc/sec of He