DigiFlow Specifications |
|
|---|---|
| Accuracy of Mass Flow Measurement | 0.05% FS 1σ (30 PSIA unit) |
| Range of Flow Rate | 0 to 0.5 SLPM, 1 SLPM, 10 SLPM, 50 SLPM N2 |
| Sensor to Sensor Reproducibility | 0.05% FS |
| Maximum Operating Pressure | 30 PSIA, 45 PSIA, 60 PSIA,
100 PSIA, etc. Depends on pressure transducer specification |
| Operating Temperature Range | 0-125oC |
| Connections | Standard male 1/2 inch VCR fittings |
| Leakage to Atmosphere | less than 10-9 cc/sec of He |