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DigiFlow Laminar Mass Flow Controller

DigiFlow Laminar Mass Flow Controller uses laminar flow element to measure and control fluid mass flow rate. The DigiFlow is many times more accurate and stable than thermal MFCs.

Typical Applications

Specifications

Pictures

Chemicals Supported by DigiFlow

Ar, He, O2, N2, SF6, SiCl4, GeCl4, PoCl3